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The Promecon 1000 supports a single processing tube, with convenient front-panel controls and an optional interface to the furnace controller for automated operation. The Promecon 1000 is ideal for R&D or qualification applications, or for small fabs. |
The Promecon 1000 system consists of :
- CNT-OEM-xxx cantilever-head upgrade unit
- CIS-OEM-xxx Customized ceramic set for paddle insulation
- P1000-OEM-FTH high-voltage feedthroughs
- EGU-OEM-xxx electrical grounding unit
A functional block diagram of an upgraded system is shown below.
1] P1000 ControllerThis unit contains the power supplies and controls. The electrical unit can be provided in three configurations: rack mount, vertical mount, or standalone. The electrical unit supplies the high-voltage signal, and provides safety, interlock, and control functions. |
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Specifications
Dimensions………………..388mm x 388mm x 152mm (Std.
19" rack)
Access……………………...Front panel (operation),
Rear or top panel
Connecting cables..............Rear or top panel
Cable length…..…………...To Interface unit 6m max
Cable length….…….……...To P1000-OEM-FTH feedthroughs
20m max
Operating Environment…..Class 10,000 or better air.
Operating Temperature…..20 to 50 ºC.
Power Input………………...Single phase, 110V / 220v
, 50 / 60 Hz , 800 W.
Weight……………………....17 Kg
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The customer furnace tube assembly must be slightly modified to allow electric field application. The exact nature of the modifications depends on the furnace model and loader. |
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Horizontal furnaces do not normally require any modification in the process tube itself. A typical approach is shown at left: the cantilever loader rod is inserted into a multipart ceramic insulator, contained in a stainless steel outer shell. High voltage is delivered through dual shielded feedthrus, with cabling captured in a flexible track. The process tube is dual-grounded usng conventional clamps on the gas entry lines. Grounding is electrically compatible with element sag detectors. |
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The interface unit provides communication between the furnace tube controller and the Promecon™ electrical unit. |
Specifications
Dimensions........................................
Up to 300mm x 150 mm x 100mm
Power Requirement.......................... Single-phase, 100-250V, 50 / 60
Hz, 120W
Distance to Electrical unit................. 6m max
Distance to furnace-controller I/O... 1m max
Operating Temperature ....................20 ºC to 60 ºC
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Due to the wide variety of loaders, furnace tubes, and process controllers installed at various facilities, some customization of the design is often required. A Sizary engineer will work with you at your site to determine the appropriate configuration for your tool set. |
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